Interposer between a tester and meaterial handling equipment to separate and control different requests of multiple entities in a test cell operation

ABSTRACT

An apparatus for testing a device. The apparatus comprises a test control module and a test analysis module. The test control module is operable to generate and transmit first prober and handler (PH) requests to a supervisor module. The supervisor module is operable to transmit first PH commands to a prober and handler for execution thereof. The test analysis module is operable to generate and transmit second PH requests to the supervisor module. The supervisor module is further operable to transmit second PH commands to the prober and handler for execution thereof. The execution of the second PH commands are performed transparently to the test control module.

TECHNICAL FIELD

The present disclosure relates generally to the field of automated testequipment and more specifically to the field of statistical processcontrol of automated test equipment.

BACKGROUND

Automated test equipment (ATE) can be any testing assembly that performsa test on a device, semiconductor wafer or die, etc. ATE assemblies maybe used to execute automated tests that quickly perform measurements andgenerate test results that can then be analyzed. An ATE assembly may beanything from a computer system coupled to a meter, to a complicatedautomated test assembly that may include a custom, dedicated computercontrol system and many different test instruments that are capable ofautomatically testing electronics parts and/or semiconductor wafertesting, such as system-on-chip (SOC) testing or integrated circuittesting.

The test results that are provided from an ATE assembly may then beanalyzed to evaluate electronic component being tested. Such test resultevaluations may be a part of a statistical process control method. Inone exemplary embodiment, statistical process control methods may beused to monitor and control a manufacturing process to ensure that themanufacturing process is producing the desired product at a desiredlevel of efficiency and at a desired level of quality. In one exemplaryembodiment, after a prescribed ATE test run has completed, the compiledtest results are statistically analyzed using a statistical processcontrol method. Changes to the manufacturing process and/or test processmay also be implemented in follow-on production runs based upon thestatistical analysis of the test results.

SUMMARY OF THE INVENTION

Embodiments of this present invention provide a solution to thechallenges inherent in implementing statistical process control methodsin automated testing. In particular, embodiments of this invention maybe used to make execution decisions beyond pass/fail results byproviding an opportunity to correct a process before many testing hourshave been expended on wafers being tested either incorrectly, or onwafers that have an inherent problem. In one exemplary embodiment of thepresent invention, a method for real-time statistical analysis of testresults is disclosed. In the method, after a determined quantity ofrequested test results have been collected, statistical analysis of thecollected test results may be performed with selected actions performedin response to any identified testing errors or defective wafers. Asdescribed herein, the assessment process and actions may also be appliedto wafer sort and final test statistics, as well as wafer tests.

In one exemplary embodiment, an apparatus for testing a device isdisclosed. The apparatus comprises a test control module and a testanalysis module. The test control module is operable to generate andtransmit first prober and handler (PH) requests to a supervisor module.The supervisor module is operable to transmit first PH commands to aprober and handler for execution thereof. The test analysis module isoperable to generate and transmit second PH requests to the supervisormodule. The supervisor module is further operable to transmit second PHcommands to the prober and handler for execution thereof. The executionof the second PH commands is performed transparently to the test controlmodule.

In one exemplary embodiment, a method for testing a device is disclosed.The method comprises generating and transmitting first prober andhandler (PH) commands to a prober and handler for execution. The firstPH commands are generated in response to first PH requests from a testcontrol module. The method further comprises generating and transmittingsecond PH commands to the prober and handler for execution. The secondPH commands are generated in response to first PH requests from a testanalysis module. The execution of the second PH commands is performedtransparently to the test control module.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be better understood from a reading of thefollowing detailed description, taken in conjunction with theaccompanying drawing figures in which like reference charactersdesignate like elements and in which:

FIG. 1 illustrates an exemplary simplified block diagram of an automatedtest equipment (ATE) implementing statistical process controls;

FIG. 2 illustrates an exemplary graphical user interface for selecting,editing, and creating statistical process control rules;

FIG. 3 illustrates an exemplary graphical user interface for displayingtest results of control rules;

FIG. 4 illustrates an exemplary block diagram of a statistical analysisand control apparatus for real-time management of statistical processcontrols in accordance with an embodiment of the present invention;

FIG. 5 illustrates an exemplary customizable state machine component ofa statistical analysis and control apparatus in accordance with anembodiment of the present invention;

FIG. 6 illustrates an exemplary lot recipe control component of astatistical analysis and control apparatus in accordance with anembodiment of the present invention;

FIG. 7 illustrates an exemplary statistical process control component ofa statistical analysis and control apparatus in accordance with anembodiment of the present invention;

FIG. 8 illustrates an exemplary bin control component of a statisticalanalysis and control apparatus in accordance with an embodiment of thepresent invention;

FIG. 9 illustrates an exemplary measured value monitor component of astatistical analysis and control apparatus in accordance with anembodiment of the present invention;

FIG. 10 illustrates an exemplary custom component to be added to astatistical analysis and control architecture in accordance with anembodiment of the present invention;

FIG. 11 illustrates an exemplary process parameter control component ofa statistical analysis and control apparatus in accordance with anembodiment of the present invention;

FIG. 12 illustrates an exemplary flow diagram, illustrating the steps toa method for real time process control analysis and action in accordancewith an embodiment of the present invention;

FIG. 13 illustrates an exemplary flow diagram, illustrating the steps toa method for creating and executing a decision tree during periods oftest inactivity in accordance with an embodiment of the presentinvention;

FIG. 14 illustrates an exemplary flow diagram, illustrating the steps toa method for creating and executing a decision tree during periods oftest inactivity in accordance with an embodiment of the presentinvention;

FIG. 15 illustrates an exemplary prober/handler supervisor component anda proxy prober/handler driver connected with a statistical analysis andcontrol architecture in accordance with an embodiment of the presentinvention;

FIG. 16 illustrates an exemplary flow diagram, illustrating the steps toa method for real-time test analysis and action execution during acontinuing automated test in accordance with an embodiment of thepresent invention; and

FIG. 17 illustrates an exemplary flow diagram, illustrating the steps toa method for interposing prober or handler commands that are transparentto a test program executing an on-going test.

DETAILED DESCRIPTION

Reference will now be made in detail to the preferred embodiments of thepresent invention, examples of which are illustrated in the accompanyingdrawings. While the invention will be described in conjunction with thepreferred embodiments, it will be understood that they are not intendedto limit the invention to these embodiments. On the contrary, theinvention is intended to cover alternatives, modifications andequivalents, which may be included within the spirit and scope of theinvention as defined by the appended claims. Furthermore, in thefollowing detailed description of embodiments of the present invention,numerous specific details are set forth in order to provide a thoroughunderstanding of the present invention. However, it will be recognizedby one of ordinary skill in the art that the present invention may bepracticed without these specific details. In other instances, well-knownmethods, procedures, components, and circuits have not been described indetail so as not to unnecessarily obscure aspects of the embodiments ofthe present invention. The drawings showing embodiments of the inventionare semi-diagrammatic and not to scale and, particularly, some of thedimensions are for the clarity of presentation and are shown exaggeratedin the drawing Figures. Similarly, although the views in the drawingsfor the ease of description generally show similar orientations, thisdepiction in the Figures is arbitrary for the most part. Generally, theinvention can be operated in any orientation.

NOTATION AND NOMENCLATURE

Some portions of the detailed descriptions, which follow, are presentedin terms of procedures, steps, logic blocks, processing, and othersymbolic representations of operations on data bits within a computermemory. These descriptions and representations are the means used bythose skilled in the data processing arts to most effectively convey thesubstance of their work to others skilled in the art. A procedure,computer executed step, logic block, process, etc., is here, andgenerally, conceived to be a self-consistent sequence of steps orinstructions leading to a desired result. The steps are those requiringphysical manipulations of physical quantities. Usually, though notnecessarily, these quantities take the form of electrical or magneticsignals capable of being stored, transferred, combined, compared, andotherwise manipulated in a computer system. It has proven convenient attimes, principally for reasons of common usage, to refer to thesesignals as bits, values, elements, symbols, characters, terms, numbers,or the like.

It should be borne in mind, however, that all of these and similar termsare to be associated with the appropriate physical quantities and aremerely convenient labels applied to these quantities. Unlessspecifically stated otherwise as apparent from the followingdiscussions, it is appreciated that throughout the present invention,discussions utilizing terms such as “processing” or “accessing” or“executing” or “storing” or “rendering” or the like, refer to the actionand processes of a computer system, or similar electronic computingdevice, that manipulates and transforms data represented as physical(electronic) quantities within the computer system's registers andmemories and other computer readable media into other data similarlyrepresented as physical quantities within the computer system memoriesor registers or other such information storage, transmission or displaydevices. When a component appears in several embodiments, the use of thesame reference numeral signifies that the component is the samecomponent as illustrated in the original embodiment.

Embodiments of this present invention provide a solution to thechallenges inherent in implementing statistical process control methodsin automated testing. In particular, embodiments of this invention maybe used to make process decisions beyond simple pass/fail results byproviding an opportunity to correct a production and/or testing processbefore many testing hours have been expended on devices (e.g.semiconductor wafers, system on a chip (SOC) or integrated circuits,etc.) being tested either incorrectly or on devices that have aninherent problem. In one exemplary embodiment of the present invention,a method for real-time statistical analysis of test results isdisclosed. After a quantity of test results have been collected,statistical analysis of the collected test results may be performed andactions may be executed in response to any identified testing errors ordefective devices, semiconductor wafers or dies. In particular, thestatistical analysis may be performed during periods of reduced testingactivities, such as during indexing time of prober and handlingequipment. Furthermore, additional material handling commands (e.g.,needle cleaning, z-height adjustment, stop, etc.) may be injectedtransparently between a testing program and a materials handler.

Statistical Process Control Analysis:

As described herein, statistical process control (SPC) rules may beexecuted in a short loop on an exemplary test cell controller. SPC rulesprovide early detection, notification, and control actions throughstatistical analysis of various test data parameters such as parametrictest values, yield values, and bin results. The SPC rules may beexecuted in synchronicity with normal test cell controller programactivities, such as handler and prober equipment communications. In oneexemplary embodiment, SPC rules may be used to detect whether lottesting process results are in or out of control. For example, aGaussian process parameter distribution which is running out of controlmay be characterized by a mean or standard deviation statistic which hasdrifted from an expected value. In a further example, iddq measurements(iddq testing is a method for testing integrated circuits formanufacturing faults) that are running higher than the normal standarddeviation may indicate a die that will experience early failure becauseof internal breakdown. A go/no-go test will miss this while statisticalprocess rule analysis may identify it. These statistical values can bemonitored live during a lot test and identified SPC failures (e.g.control rule violations) can be used to trigger corrective or abortiveactions. By detecting an SPC rule failure and discontinuing furthertesting, unnecessary testing time can be avoided, identified problemscan be corrected, and yields and other evaluative metrics can beimproved.

As described herein, exemplary embodiments utilizing SPC rule analysismay provide for the detection of historical results such as a bin thathas had too many failures, a site that has yields lower than othersites, and statistical value results which are drifting from theirin-control ideal values. SPC may also detect process issues on partsthat are passing but are not within predicted process limits. Forexample, while parts may be passing within hard limits, violations ofSPC rules, once detected in real-time, can be used to determine thatprocess issues are present and may be addressed.

As described in detail below, an exemplary statistical analysis andprocess control framework executed on a test cell controller may providemany benefits. For example, non-invasively capturing measurement valuesand bin counts for the calculation of statistical results. Test suiteexecution may be synchronized without requiring the use of executioninput library calls or prober/handler (PH) hook functions. In oneexemplary embodiment, a test suite may be part of a test flow thatdefines one or more tests. In one exemplary embodiment, a test cellcontroller may execute a test flow comprising one or more test suites.

SPC rules, result analysis, and reporting may be centrally managed. SPCrules may also be integrated within existing test programs withoutrequiring any changes to an application model. Prober and handlerequipment may be controlled from SPC rule actions without the need for acustom driver when an existing driver has the required controlcapabilities. Lastly, custom SPC rules may be created for a specifictesting environment and a specific device-under-test. Table 1 listsseveral exemplary SPC rules. Exemplary SPC rules may be custom designedfor a particular type of data to be monitored, the type of rule itself,as well as the types of actions that may be implemented with thedetection of the associated SPC rule violation. SPC rule data types,monitoring types, and actions are not limited to what is shown.Exemplary SPC rules may also include enhancements to monitor other typesof data and use additional types of analysis and actions.

TABLE 1 example rule types, data monitored and actions taken DataMonitored Rule Type Actions Yield Limit monitoring Email Bin countSite-to-site difference Needle clean Measured value Trend monitoringRetest Prober/handler parameters Marginal Monitoring Z-height adjustmentCustom data source Stop testTest Cell with Integrated Statistical Analysis and Process Control:

As illustrated in FIG. 1, an exemplary automated test equipment 100embodiment with integrated statistical process control comprises: a testcell controller 102, a testing apparatus 104, material handlingequipment 106, a database server 112, and a web server 114 (e.g.containing control rule recipes and reports). The automated testequipment 100 may provide real-time statistical analysis of test resultsand an insertion of prober or handler commands that are transparent to atest program 103. In one exemplary embodiment, the material handlingequipment 106 may comprise a prober 108 and a handler 110. In oneexemplary embodiment, the prober 108 is a socket or probe cardcomprising a plurality of pins or needles that come in contact with adevice-under-test (e.g., semiconductor wafer, die, etc.). As illustratedin FIG. 1, a test cell controller 102 may comprise a test program 103.The test program 103 may comprise an application model. The web server110 may be used to enter SPC rules, analyze results and monitor process.The web server 110 may also comprise a web-based SPC editor for creatingand editing SPC rules. In exemplary embodiments the web server 110 maybe a desktop computer with a web browser. The testing apparatus 104, inaddition to testing, may capture test result values, bin counts, andvarious types of yield counts used to test SPC rules. In one exemplaryembodiment, a plurality of testing apparatuses 104 may be controlled bythe test cell controller 102 and evaluated for statistical processcontrol.

Results of data collection (raw and statistical) and SPC rules executionresults may be stored on the database server 112. The web server 114 mayaccess these stored results, as well as other tools, as described indetail below. Data in this database 112 may be analyzed during SPC ruleevaluations. In one exemplary embodiment, as described in detail below,the test controller 114 further comprises a statistical analysis andprocess control framework that non-intrusively captures test results andtests the SPC rules with minimum overhead and a small code footprint.

SPC Rules Web-Based Editor:

In one exemplary embodiment, SPC rules, to be executed as described indetail below, are created and edited with a web interface (e.g., the webserver 110) and stored in a relational database. Test programinformation may be imported to support rule editing (e.g., specificparametric values such as defined intervals, thresholds and trends maybe selected or defined). This information may consist of software bininformation, hardware bin information, a plurality of available testsuites, and a plurality of available tests. As illustrated in FIG. 2,once a device-under-test 202, a test program 204 and a stage 206 havebeen selected 208 in an exemplary graphical user interface, a variety ofrules related to the device-under-test 202 and the test program 204 maybe selected, edited and defined in the web interface. The graphical userinterface may further comprise a selection panel for selecting SPCrules. After a test program is selected, a list of SPC rules that relateto the selected test program may be selected from for verification ofassociated process control rules by statistical analysis of the testresults generated from the selected test program.

As illustrated in FIG. 2, in one exemplary embodiment, a bin count ruleselection panel 210 and a test value rule selection panel 212 aredisplayed. As described herein, in addition to the bin count and testvalue rules, selection panels for yield, test time, and recovery raterules are also available with selection panels similar to thoseillustrated in FIG. 2 for bin count rules and test value rules. The bincount rule selection panel 210 may comprise a plurality of differentselectable components depending on the type of rule. A Limit_Monitoring:Consecutive Bin Count rule 210 a may comprise the following selectablecomponents: a bin_type 220, a bin_num 222, a consecutive number 224, aper_site designation 226, an action 228, and an option to delete therule 230. A Limit_Monitoring: Total Count Bin Count rule 210 b maycomprise the following selectable components: a bin_type 220, a bin_num222, a total count 232, an action 228, and an option to delete the rule230. As also illustrated in FIG. 2, a bin count rule 210 may also have avariety of different components/fields and produce differing rules asillustrated by the Limit_Monitoring: Consecutive Bin Count rule 202 aand the Limit_Monitoring: Total Count Bin Count rule 202 b.

The exemplary test value rule selection panel 212 may also comprise aplurality of different selectable components depending on the type ofrule. As illustrated in FIG. 2, an exemplary Limit_Monitoring: DefaultTest Value rule 212 a may comprise the following selectable components:a test name 240, a statistic 242, an interval 244, a sample size 246, alow limit 248, a high limit 250, a unit 252, an action 228, and anoption to delete the rule 230. An exemplary Limit_Monitoring:Site-to-Site: Default Test Value rule 212 b may comprise the followingselectable components: a test name 240, a statistic 242, an interval244, a sample size 246, a site-to-site difference percentage 252, anaction 228, and an option to delete the rule 230.

As further illustrated in table 2, 5 different yield rules may becreated and/or edited. As illustrated in table 2, each yield rule may beassociated with a plurality of parameters. In one exemplary embodiment,the Limit_Monitoring: Accumulate rule verifies a yield total after everytest flow execution (from one or more multiple sites). In one exemplaryembodiment, the Limit_Monitoring: Rolling rule verifies a yield at aninterval defined by the rule. In one exemplary embodiment, theLimit_Monitoring_Site_to_Site: Accumulate rule verifies a yielddifference between sites after every test flow execution. In oneexemplary embodiment, the Limit_Monitoring_Site_to_Site: Rolling ruleverifies a yield at an interval defined by the rule, with the yieldverification based on a site-to-site difference percent parameter.Lastly, in one exemplary embodiment, the Trend_Monitoring: Default rulemay verify if a yield goes up or down for a number of consecutive times.

TABLE 2 Creating and defining Yield rules Limit_Monitoring: Accumulate:Minimum sample size; Low limit; High limit; Per_site; Sim_Prod; andActions Limit_Monitoring: Rolling: Rolling yield interval; Low limit;High limit; Per_site; Sim_Prod; and Actions Limit_Monitoring_Site_toSite: Accumulate: Minimum sample size; Site-to-site diff. percent;Sim_Prod; and Actions Limit_Monitoring_Site_to_Site: Rolling: Rollingyield interval; Site-to-site diff. percent; Sim_Prod; and ActionsTrend_Monitoring: Default: Sample size; Interval; Per_site; Trend type;Trend count; Sim_Prod; and Actions

As also illustrated in table 2, several parameters may be defined foreach rule. The minimum sample size parameter may define a minimum numberof devices to be tested before verifying an SPC rule. The low limitparameter may define a low limit yield value; the high limit parametermay define a high limit yield value. The per_site parameter may bedefined as YES when verifying per site, and NO when all sites arecombined. The Sim_Prod parameter may define whether the test is onproduction data or a simulation. The action parameter may define whichaction is to be implemented (e.g., email, stop, needle clean, etc.). Therolling yield interval parameter may define the number of devices to betested before an SPC rule is verified. The site-to-site differentialpercent parameter may define a maximum yield difference between anysites (e.g., if set to 10%, the rule will fail if there's a yielddifference greater than 10% between sites). The sample size parametermay define a minimum number of devices to test before rule verification.The interval parameter may define an interval between verifications ofan SPC rule. The trend type parameter may define a type of trend (e.g.,ASCEND will verify if the yield goes up for a number of times specified,while DESCEND will verify if the yield goes down for a number of timesspecified). The trend count parameter defines when the rule will fail ifthis count is reached.

As described herein and illustrated in table 3, in one exemplaryembodiment, 4 different bin count rules may be created and defined. Eachbin count rule may be associated with a plurality of parameters. In oneexemplary embodiment, the Limit_Monitoring: Consecutive rule may checkif a maximum number of consecutive bin failures has been exceeded. Inone exemplary embodiment, the Limit_Monitoring: Total_Count rule maycheck that a total count for a specific hardware or software bin doesnot exceed a defined count parameter. In one exemplary embodiment, theLimit_Monitoring: Total_Percent rule may check that the total percentagefor a specific hardware or software bin does not exceed a definedpercent parameter. In one exemplary embodiment, theLimit_Monitoring_Site_to_Site: Accumulate rule may check that adifference in hardware or software bins, expressed in percentage, cannotexceed a defined value between sites.

TABLE 3 Creating and defining Bin Count rules Limit_Monitoring:Consecutive: Bin type; Bin number; Consecutive; Per_site; Sim_Prod; andActions Limit_Monitoring: Total_Count: Bin type; Bin number; TotalCount; Sim_Prod; and Actions Limit_Monitoring: Total_Percent: Bin type;Bin number; Sample size; Total percent; Sim_Prod; and ActionsLimit_Monitoring_Site_to_Site: Accumulate: Bin type; Bin number; minimumsample size; Site-to-site diff. percent; Sim_Prod; and Actions

As also illustrated in table 3, several parameters may be defined foreach rule. The bin type parameter may define whether the bin is asoftware bin or a hardware bin. The bin number parameter may define aparticular bin. The consecutive parameter may define a maximum number ofconsecutive bin failures. The per_site parameter may be defined as YESwhen verifying per site, and NO when all sites are to be combined. Thesim_prod parameter may define whether the test is on production data ora simulation. The action parameter may define which action is to beimplemented (e.g., email, stop, needle clean, etc.). The total countparameter may be defined as a maximum count for a give hardware bin orsoftware bin. The sample size parameter may be defined as a minimumnumber of devices to be tested before an SPC rule verification isperformed. The total percent parameter may be defined as a maximumpercentage for a given hardware bin or software bin. The minimum samplesize parameter may be defined as a minimum number of devices to betested before verification. The site-to-site diff. percent parameter maydefine a maximum yield difference between any sites.

As discussed herein and illustrated in table 4, in one exemplaryembodiment, 3 different bin recovery rate rules may be created anddefined. As illustrated in table 4, each bin recovery rate rule isassociated with a plurality of parameters. In one exemplary embodiment,the Limit_Monitoring:Bin_Recovery_Rate rule may check for a percentageof recovered parts for a given bin based on a total of all failed bincounts in a first pass. In one exemplary embodiment, the followingformula is used: bin count recovered/total of all failed bin counts infirst pass*100. In one exemplary embodiment, theLimit_Monitoring:Bin_Recovery_Rate Efficiency rule may check apercentage of recovered parts for a given bin based on a bin count in afirst pass. In one exemplary embodiment, the following formula is used:bin count recovered/bin count in first pass*100. In one exemplaryembodiment, the Limit_Monitoring:Overall_Recovery_Rate rule may check apercentage of recovered parts for all bins based on a total of all bincounts in a first pass. In one exemplary embodiment, the followingformula is used: all bin counts recovered/total number of all bin countsin a first pass*100.

TABLE 4 Creating and defining Bin Recovery Rate ruleLimit_Monitoring:Bin_Recovery_Rate: Bin type; Bin number; low limitpercent; high limit percent; Sim_Prod; and ActionsLimit_Monitoring:Bin_Recovery_Rate_Efficiency: Bin type; Bin number; lowlimit percent; high limit percent; Sim_Prod; and ActionsLimit_Monitoring:Overall_Recovery_Rate: Low limit percent; high limitpercent; Sim_Prod; and Actions

As also illustrated in table 4, several parameters may be defined foreach rule. The bin type parameter may define whether a bin is a softwarebin or a hardware bin. The bin number parameter may define a particularbin. The low limit percent parameter may define a low limit for apercentage of recovered parts. The high limit percent may define a highlimit for a percentage of recovered parts. The sim_prod parameter maydefine whether the test is on production data or a simulation. Theaction parameter may define which action is to be implemented (e.g.,email, stop, needle clean, etc.) when an SPC rule fails.

As discussed herein and illustrated in table 5, in one exemplaryembodiment, 4 different test value rules may be created and defined. Asillustrated in table 5, each test value rule is associated with aplurality of parameters. In one exemplary embodiment, theLimit_Monitoring:Default rule may verify a test statistic (e.g. mean,standard deviation, process capability index (CPK), etc.) against a highlimit and a low limit at regular intervals defined by an intervalparameter. The data compiled for each statistic is accumulated beginningwith a first device tested (with any statistical analysis performedafter collecting a minimum number of samples). In one exemplaryembodiment, the Limit_Monitoring:Site_to_Site:Default rule may verify atest statistic (e.g. mean, standard deviation, process capability index(CPK), etc.) across sites, comparing a difference in percentage againsta site-to-site difference percent limit at regular intervals defined bythe interval parameter. The data compiled for each statistic isaccumulated beginning with a first device tested (with any statisticalanalysis performed after collecting a minimum number of samples). In oneexemplary embodiment, the Trend_Monitoring:Default rule may verify if aselected test statistic goes up or down in value for a number ofconsecutive times.

In one exemplary embodiment, the Marginal Monitoring:Default rule mayverify a mean of a test against a high margin and a low margin expressedin sigma at regular intervals defined by the interval parameter. Thedata compiled for each statistic is accumulated beginning with a firstdevice tested (with any statistical analysis performed after collectinga minimum number of samples). In one exemplary embodiment, each test maybe defined with a minimum sample size, an interval, a low margin, and ahigh margin (the margins expressed in sigma-standard deviation) for adifference between the test limits and the mean. In one exemplaryembodiment, at run-time, an SPC module may start checking the marginalrule after a minimal sample of test executions. An SPC rule may beexecuted periodically at a defined interval (e.g., the SPC rule isverified or checked, etc.). In one exemplary embodiment, the SPC modulemay calculate a difference between a low limit and an average value of aspecified test and determine if the average value is higher than a lowmargin parameter to pass the rule. A difference between the high limitand the average value of the specified test will also be checked to seeif the average value is higher than a high margin parameter value.

TABLE 5 Creating and defining test value rules Limit_Monitoring:Default:Test name; Statistic; Interval; Sample size; Low limit; High limit;Unit; Sim_Prod; and Actions Limit_Monitoring_Site_to_Site:Default: Testname; Statistic; Interval; Sample size; Site-to-site diff. percent;Sim_Prod; and Actions Marginal_Monitoring:Default: Test name; Statistic;Interval; Sample size; Margin_low; Margin_high; Unit; Sim_Prod; andActions Trend_Monitoring:Default: Test name; Statistic; Interval; Samplesize; Trend type; Trend count; Sim_Prod; and Actions

Table 5 also illustrates that several parameters may be defined for eachrule. The test name parameter may define which SPC test is selected formonitoring. The statistic parameter may define a particular statisticalevaluation to be executed (e.g. MEAN, MIN, MAX, STD, CP, SPK, CPL, andCPU, etc.). The interval parameter may define an interval at which anSPC rule is verified. The sample size parameter may define a minimumnumber of test executions that must be executed before the rule ischecked for the first time. The low limit parameter may define a lowlimit for the selected statistic. The high limit parameter may define ahigh limit for the selected statistic. The unit parameter may define adesired measurement, such as microamperes, etc. The sim_prod parametermay define whether the test is on production data or a simulation. Theaction parameter may define which action is to be implemented (e.g.,email, stop, needle clean, etc.). The site-to-site difference percentmay define a maximum percentage difference allowed between any sites fora given statistic. The margin_low parameter may define a minimumdifference in sigma between a mean and a low limit. The margin_highparameter may define a minimum difference in sigma between a mean and ahigh limit. The interval type parameter may define an interval betweenverifications. The trend type parameter may define a type of trend(e.g., selecting ASCEND will verify whether the yield goes up for anumber of times specified, while selecting DESCEND will verify whetherthe yield goes down for a number of times specified). The trend countparameter may define a count that when reached fails the rule.

As described herein, an exemplary test time rule may also be created anddefined. Each test time rule may be associated with a plurality ofparameters. In one exemplary embodiment, a test time rule may verify aminimum, maximum, or mean of a test suite test time against a high limitand a low limit at regular intervals defined by an interval parameter.In one exemplary embodiment, several parameters may be defined for atest time rule. In one exemplary embodiment, a test time rule comprisesthe following parameters: a test suite parameter, a statistic parameter,a sample size parameter, an interval parameter, a low limit parameter, ahigh limit parameter, a unit parameter, a sim_prod parameter, and anaction parameter. The test suite parameter may define one or more SPCtest cells that may be selected for monitoring. The statistic parametermay define a selected statistical test (e.g., MEAN, MIN, and MAX, etc.).The sample size parameter may define a minimum number of test suiteexecutions before an SPC rule is checked for the first time. Theinterval parameter may define an interval at which a rule is verified.The low limit parameter may define a low limit for a selected statistic.The high limit parameter may define a high limit for a selectedstatistic. The unit parameter may define a desired measurement, such asmicroamperes, etc. The sim_prod parameter may define whether the test ison production data or a simulation. The action parameter may definewhich action is to be implemented (e.g., email, stop, needle clean,etc.) when an SPC rule fails.

As illustrated in FIG. 2 and tables 2-5, and discussed herein, exemplarySPC rules may be customized. Exemplary embodiments of a web-basededitor, as described herein, may provide a solution which is availablefor multiple types of computers. By storing the rules in a database,exemplary statistical analysis and process control framework embodimentsmay make them available to other tools and may also make it possible forother tools to create the SPC rules as compared to a solution whichstores the SPC rules in a proprietary format. While the rulesillustrated and discussed herein may be created and customized, othercontrol rules are also possible, with additional selectable parametersto be defined.

An exemplary customizable utility may import basic information regardinga test program. This import utility may aid in determining what bins,values, and data can be applied to the SPC rules before the test programhas been run. The import utility can capture this data and make itavailable to the web editor so that SPC rule options are based on theactual device to be tested and the test program to be used. The importutility provides a complete list of test IDs, test names, test suites,test units and limits, and software/hardware and bin numbers. Thesespecific test particulars can then be used by a web editor to set upexemplary SPC rules.

In one exemplary embodiment, the import utility may depend on a type ofdevice being tested at least once before SPC rules are in place. Afterat least one testflow execution, the import process can take place. Inone exemplary embodiment, this operation may be part of the productrelease to production. Therefore, after the import has been performed,any desired SPC rules can be created. An exemplary SPC Rules web-basededitor, as discussed herein, provides for the importation of test names,test suites, and bins from actual test program execution results. In oneexemplary embodiment, control can be exerted as to how a control rule isto be applied. Such control may also be exerted to define how soontesting is to take place so that a yield total or some other statisticalmeasurement is not calculated before a proper sample has been gathered.

In one exemplary embodiment, multiple actions for each rule failure maybe specified. Further, when more than one rule fails, an order ofexecuting the actions may be determined. An exemplary statisticalanalysis and process control framework may take into account theseverity of individual SPC rule actions when evaluating them. Forexample, an SPC rule that causes a stop when violated is more seriousthan one that requires a needle cleaning. In one exemplary embodiment,as discussed herein, bin rules can be based on either a software bin ora hardware bin. This can provide a powerful control because softwarebins may allow a check on very specific test failures while hardwarebins can sometimes be multiple failures grouped together.

An exemplary web server 110, as illustrated in FIG. 1, may allow theentry of SPC rules and provide a display of SPC rule execution results.Using a display window, as illustrated in FIG. 3, the SPC rule resultsof a test program execution may be viewed. As illustrated in FIG. 3,once a device-under-test 202, a test program 204 and a stage 206 havebeen selected 208; a variety of test results may be viewed. As furtherillustrated in FIG. 3, with the selection of a device-under-test 202 anda test program 204, a particular test cell 302, a rule type 304, lot ID306, and wafer ID 308 may be selected 310. Such selections may allow theanalyze of test results for a particular test cell 302, rule type 304,lot ID 306 or wafer ID 308. In one exemplary embodiment, the wafer ID308 may be a device ID, a system-on-a-chip (SOC) ID, or an integratedcircuit ID.

As further illustrated in FIG. 3, test results for yield rule executionsare illustrated. The yield rule test results panel 312 comprises aplurality of components that were defined in the SPC rules editorillustrated in FIG. 2. As illustrated in FIG. 3, in one exemplaryembodiment, the test results may comprise a start-time value 320, ahost_name 322, a lot_ID 324, a wafer_ID 326, a min_sample_size value328, a low_limit value 330, a high_limit value 332, a per_site field334, an action selected 336, and rule results 338 for each test, assorted. As illustrated in FIG. 3, individual test results may beprovided for each of the wafer IDs 326.

The exemplary display may be filtered by device, lot, and sort number.The results of this display window may be live, but delayed by 30seconds. In one exemplary embodiment, SPC rule verification results maybe stored in a database within 30 seconds. In one exemplary embodiment,new SPC rules may only be applied to a next lot to be tested. Thisensures that an SPC rule is never changed mid-lot. As described indetail below, the web server 110 may be integrated into a statisticalanalysis and process control framework that provides SPC rule execution(e.g., verification of rules and actions executed for rule failures) andan optimized process control. As described below, SPC rules may beexecuted in either a short loop control and/or a long loop control.

SPC Rules Execution in a Short Loop Control:

As described in detail below, in one exemplary embodiment, the executionof SPC rules may be divided into a short loop control or a long loopcontrol. A short loop control rule provides process control within atest cell based upon immediately available data. A short loop controlmay be executed during periods of reduced testing, such as during anindex time of the prober 108 and the handler 110 of the handlingequipment 106 (a period of time from the end of a current test flow andthe beginning of a next test flow execution, e.g, the time it takes toposition the probe 108 from one XY position on a wafer to another XYposition on the wafer) or when the handling equipment 106 (e.g., thehandler 110) is preparing for a next lot or die to test. When a testflow completed event is received from the test suite program, a statemachine may trigger a verification of SPC rules and resultant actionsmay be taken if an SPC rule fails. In one exemplary embodiment, a shortloop control may provide an analysis and an action as illustrated intable 6. For example, if a prober or handler action is requested inresponse to an SPC rule violation, a state machine may put the prober orhandler drivers on hold before the next device is executed.

TABLE 6 Example short loop control rules Exemplary Short Loop ControlSPC rules: Stop a prober if a maximum number of consecutive errors ordefects (e.g. open/short) for a current bin is exceeded. Perform aneedle cleaning if a total number of failures for a current bin exceedSPC limits for the device. Send an email if a standard deviation of aniddq test falls outside of pre-defined limits. Perform a custom actionif a site-to-site yield difference is greater than 10%.

In one exemplary embodiment, based on current data and results which maybe stored in a test cell controller memory, a short loop control may beimplemented. This short loop may be synchronized with a handlingequipment/prober index time (e.g. pauses in testing for various reasonsas discussed herein) to reduce impact on throughput. The results may beevaluated immediately after testflow execution. Therefore, in oneexemplary embodiment, the test execution may be stopped after the mostrecent die or package. Exemplary embodiments compare process controlparameters against known metrics based on a current lot execution. Forexample, an SPC rule may determine whether an iddq standard deviationstatistical result has gone above a limit for a lot being tested.

SPC Rule Execution in a Long Loop Control:

An exemplary long loop control may be based on an analysis of historicaldata (e.g., data stored in a database and compared across testers, lots,and testing locations). An exemplary embodiment may execute SPC rules ina long loop with a central database. Actions may still occur aftertestflow execution, but are based on data previously gathered. In oneexemplary embodiment, the stored data is from previous lots or othertest cells. A long loop control may compare process control parametersagainst known metrics and data from previous executions. For example, 10test cells may be testing a same type of device, lot or die. In thisexample, statistical analysis has determined that 1 of the 10 test cellsis delivering a yield 10% less than the other 9 test cells. In thisexample, the subject failing test cell may be pulled off-line and afailing component, such as a channel card, identified and replaced. Withthe failing channel card replaced, follow-on statistical analysis mayshow that the measured yield has jumped back to normal for the subjecttest cell. Note: yield statistics may still be acceptable in a shortloop rule analysis, but fail when compared to previous lots in a longloop. In one exemplary embodiment, SPC rules may also be executed in along loop which compares test results from test floor-to-test floor,tester-to-tester, lot-to-lot, and wafer-to-wafer.

Comparison Between Short Loop and Long Loop:

An exemplary short loop rule analysis allows a user to check processcontrol parameters against known absolutes for a device under test, suchas maximum standard deviation and minimum yield. An exemplary long loopcontrol allows a user to check process control parameters against whatis normal for the type of device under test, and a test program such asnormal yield. Long loop rule analysis allows the user to detect adeterioration of test results across lots (time), test cells, andwafers. Both short and long loop controls may help to identify processcontrol changes caused by bad tester hardware, changes in fabricationprocesses, incorrect settings, or faulty handling equipment, contactors,or probe cards, for example. An exemplary short loop may be used toassure that a basic process is within defined limits, while an exemplarylong loop allows the comparison of historical normal process resultsagainst the current results.

Statistical Analysis and Process Control Framework:

An exemplary statistical analysis and process control framework isillustrated in FIG. 4. The modules illustrated in FIG. 4 make up themain components of the statistical analysis and process controlframework. These exemplary modules may perform their individual tasksunder the direction of a state machine which is synchronized by a testcell controller 102. In one exemplary embodiment, all modules of thestatistical analysis and process control framework run on the test cellcontroller 102 with most of the CPU loading occurring during index timeof the prober 108 and handler 110 of the handling equipment 106 (e.g.,periods of testing inactivity while a test testflow is prepared forexecution). During periods of reduced testing activities of the testprogram 103, increased computational capacity is available for resultcomputation, as described in detail below.

As illustrated in FIG. 4, an exemplary statistical analysis and processcontrol framework 400 comprises a lot recipe control module 402, anevent monitor 404, a state machine 406, a statistical process control(SPC) module 408, a bin control module 410, a measured value monitor(MVM) 412, and a prober/handler (PH) supervisor 414. An exemplary lotrecipe control module 402 may query a database server 416 for desiredSPC rules when requested by the state machine 406. In one exemplaryembodiment, this occurs at the beginning of a testing of a lot.

In one exemplary embodiment, the modules making up the statisticalanalysis and process control framework 400 may be interconnected by atest cell communications framework. In one exemplary embodiment,inter-module commands may be implemented using architecture independentshared memory structures and common semaphore synchronization patterns.In one exemplary embodiment, inter-module commands may comprise acommand and associated parameters (e.g., command parameters may be adictionary of key value pairs, raw text, or raw binary). The use ofarchitecture independent shared memory structures and common semaphoresynchronization patterns may allow the inter-connected modules to sendand receive commands and receive event notifications quickly andefficiently. In one exemplary embodiment, modules may communicatecommands directly to one another instead of routing through a centralservice, and event notifications, as described herein, may beimplemented with message queues and buffers. Events may be routedthrough a central dispatcher, such as an event monitor 404, which thenforwards the event notification to all modules. As discussed herein,commands (e.g. commands from the state machine 406 to the SPC module408) may be sent directly from a point of origination to a destinationmodule, while event notifications may be sent from a point oforigination to all modules on the test cell communications framework.

An exemplary test cell communications framework may supply event noticesto the modules of the statistical analysis and process control framework400 so that the modules may follow testing progress. In one exemplaryembodiment, upcoming computational windows of available computationresources may be anticipated or forecasted so that SPC rule executioncan take place in real-time but without test progress disruption. Eventnotifications may be sent non-synchronously, while commands may begenerated synchronously.

As described in detail below, actions of the modules, such as the statemachine 406 and the SPC module 408 may be dependent upon receiving eventnotifications concerning activities in the test cell. The event noticesinform the interconnected modules what events are happening and where inthe test flow the test cell currently is. For example, the state machine406 may use event notifications to trigger the SPC module 408 to enter around of SPC rule verifications when event notifications report that aperiod of reduced testing has been entered (e.g., when a period ofprober/handling equipment indexing has begun, e.g., when a lot or diehas finished testing and a next lot or die is being located and movedinto test position, or when a current test flow at an XY position iscompleted and the probe 108 is moved to a new XY position, etc.). In oneembodiment, the SPC module 408 performs SPC rule verifications asdirected by commands from the state machine 406, wherein the statemachine tracks the state of the testing process, e.g., where in thetesting process the test cell is and what SPC rules are ready to beverified. In one exemplary embodiment, SPC rules that are executed atthe start of or end of a die or lot or after a needle cleaning or otherchange may be dependent upon event notifications received. For example,the SPC module 408 may perform SPC rule verifications when specific testconditions have been met, such as a predetermined quantity of partstested (e.g., an interval) before a next execution of an SPC rule, or ata beginning or end of a test. As discussed herein, in one exemplaryembodiment, the SPC rule verifications may be performed by the SPCmodule 408 as directed by commands from the state machine 406 asdetermined by received event notifications.

The event monitor 404, illustrated in FIG. 4, may provide events thatcause state transitions in the state machine 406. The events may also beavailable to other modules. Exemplary examples of events areTESTPROGRAM_EXEC_STARTED, TESTPROGRAM_EXEC_COMPLETED, LOT_STARTED, andTESTFLOW_EXEC_COMPLETED. An exemplary state machine 406 may track acurrent state by transitioning on events. These exemplary statetransitions may execute exemplary function callbacks which may cause SPCrules to be evaluated. In one exemplary embodiment, the state machine406 may synchronize SPC rules download, evaluation, action execution,and reporting. As discussed herein, event notifications generated by theevent monitor 404 may be transmitted via the test cell communicationsframework to all modules of the statistical analysis and process controlframework 400 so that modules, such as the state machine 406 and SPCmodule 408 may be notified when key events occur. In one exemplaryembodiment, as described herein, the state machine 406 may send commandsto the SPC module 408 for SPC rules verification based upon receivedevent notifications.

An exemplary SPC module 408 may use the SPC rules queried at thebeginning of a lot, and under the control of the state machine 406,execute those rules at required intervals. The exemplary statisticalprocess control module 408 may also use the bin control module 410 andthe MVM module 412 for SPC data. In one exemplary embodiment, the SPCmodule 408 executes the SPC rules (e.g. performs all verifications andevaluations of SPC rules). An exemplary bin control 410 may trackoverall bin counts, consecutive bin counts, and yield (overall and persite) values. In one exemplary embodiment, the bin control 410 keepstrack of yield and binning values.

An exemplary MVM module 412 may track values and test time statisticsoverall and per site, and also capture raw data at 30 second intervals.In one exemplary embodiment, an MVM module 412 may monitor test resultsand provide on-the-fly statistical computations. An exemplaryprober/handler supervisor 414 may load and control the execution of aprober or handler driver as requested by an application model or a statemachine 406. In one exemplary embodiment, a prober/handler supervisor414 may provide programmable hold-off states for executing SPCrule-initiated actions (example: needle cleaning). As discussed below,the hold-off states may hold prober or handler commands issued from atest program 103 while a prober or handler command issued from the statemachine 406 is executed. Such a hold-off is transparent to the testprogram 103.

In one exemplary embodiment, the statistical analysis and processcontrol framework 400 may allow for efficient communication with andcontrol of modules which can collect SPC required data such asparametric test value statistics and test time statistics. The frameworkmay then allow the quick and transparent execution of SPC actions in ashort loop when an SPC rule fails. In one exemplary embodiment, theshort loop SPC rules are checked with minimum overhead and actions inresponse to detected process control rule failures can occur quickly.Exemplary statistical analysis and process control framework 400embodiments are able to achieve this by providing very fastcommunications that include inter-module commands and eventnotifications. Such communications may be coordinated with a statemachine module 406. Therefore, every module may be aware of crucial testcell events such as an end of testflow execution or a test cell programbeing ready to run.

In one exemplary embodiment, the statistical analysis and processcontrol framework 400 uses a modular architecture with components (e.g.,modules) that implement specific actions. The heart of an exemplarystatistical analysis and process control framework 400 is the statemachine module 406 which coordinates a query for SPC rules, SPC ruleexecution (e.g. verification), and execution of required actions. Thestate machine module 406 communicates with each of the modules requiredto evaluate an SPC rule. In one exemplary embodiment an MVM module 412may provide both raw and statistical data on measured values and testsuite test times. The bin control module 410 can provide both bin countsand yield (both overall and per site). The prober/handler supervisor 414may also hold off further test execution when necessary. A next testflow may be executed while the SPC rules are evaluated.

State Machine Module:

As illustrated in FIGS. 4 and 5, a customizable state machine module 406may synchronize all components with a test cell controller 102 andmaterial handling equipment 106. A tabular-driven state machine module406 may be defined in an exemplary state machine.xml file. In otherembodiments, other file formats may be used. This file may describe howevents cause transitions from one state to another and which C++callback function 502 should be called upon a state change. The C++callbacks 502 may implement SPC rule actions (rule verifications, etc).This XML file defines possible events and current states and for acurrent state and event, what the next state is. Each transition mayhave a callback and transition ID. An exemplary state machine.xml mayalso define all possible states and provide for unique call backs foridentical transitions but caused by different events. Each exemplarycallback which executes on a specific transition may communicate withthe statistical analysis and process control framework modules toproduce specific actions (e.g. checking SPC rules or executing actions).

A tabular state machine module 406 may allow the use of programming codethat is easy to understand, modify, and support, as compared to a statemachine which is hard coded. The SPC module 408 may execute the SPCrules as directed by the state machine module 406. In one exemplaryembodiment, the state machine module 406 does not know what SPC ruleswill be executed by the SPC module 408. In other words, while the statemachine module 406 may send a trigger to the SPC module 408 to begin SPCrule executions based on received event notifications (e.g., identifyingspecified intervals or desired computational windows for efficientprocessing), the state machine module 406 does not know what SPC ruleswill be verified in response to the SPC rule trigger). The state machinemodule 406 may arbitrate between the modules, and when a command hasbeen sent that causes a physical action (e.g., a command to theprober/handler supervisor 414) or some other action, the state machinemodule 406 may arbitrate when conflicting commands have been sent.

Lot Recipe Control Module:

As illustrated in FIGS. 4 and 6, an exemplary lot recipe control module402 provides an interface with the database server 416. When a lotstarts, the lot recipe control module 402 downloads a lot recipe fromthe database server 416, including SPC rules. In one exemplaryembodiment, a lot recipe control module 402 may provide the ability toquery the database 416 for SPC rules based on the current device undertest, test program, and/or sort number. In one exemplary embodiment,these SPC rules may have been previously stored by a test or productengineer. The lot recipe control module 402 queries the database 416 forthe SPC rules and then formats them into C++ data structures which areused by the SPC module 408 to evaluate, execute, and determine actionsfor each SPC rule violation. An SPC rules download may be triggered bythe state machine module 406 when a new lot is started (as determined byreceived event notifications). In one exemplary embodiment, any othermodule can query the current set of SPC rules, but the SPC module 408has the main responsibility for SPC rule execution.

Statistical Process Control (SPC) Module:

As illustrated in FIGS. 4 and 7, an exemplary SPC module 408 may beresponsible for executing SPC rules and determining whether actions arerequired. In one exemplary embodiment, the SPC module 408 may be calledby the state machine module 406 in specific states such asprober/handling equipment indexing, end of wafer, and end of lot, etc.In one exemplary embodiment, when an SPC rule fails, the SPC module 408may return the results and any requested/required actions to the statemachine module 406. In one exemplary embodiment, the state machine 406executes the requested actions. SPC rules results may be stored in thedatabase 416 within 30 seconds. In one exemplary embodiment, SPC rulesresults may be stored in the database 416 according to a configurableparameter. The configurable parameter may set an interval at which datais sent to the database 416. For example, any interval, such as 5, 10,or 30 seconds can be selected.

In one exemplary embodiment, the SPC module 408 uses the SPC rules fromthe lot recipe control module 402 and determines when SPC rules are tobe verified, which parameters to check, and what action to execute for arule failure. In one exemplary embodiment, the SPC module 408 onlyevaluates the SPC rules and leaves the rule actions (e.g. actions inresponse to rule failures) to the state machine 406. The SPC module 408communicates pass/fail status and actions to the state machine module406. In one exemplary embodiment, the state machine module 406 executesSPC rule evaluations by calling the SPC module 408 and then receivingthe results of the SPC rule executions from the SPC module 408. In oneexemplary embodiment, the SPC rules can be evaluated at the end of atestflow evaluation, the end of a wafer, or the end of a lot. Suchevaluations can be timed to occur during an index time of the prober 108and handler 110 of the handling equipment 106, (e.g., an idle timebetween the end of a last test flow and the beginning of a next testflow execution, where various operations may be carried out, such asdevice switch out, binning, moving a probe 108 from one XY location on awafer to another XY location, etc.).

Prober/Handler (PH) Supervisor:

As illustrated in FIGS. 4 and 15, and described in detail below, anexemplary prober/handler supervisor 414 may receive multiple commandsfrom multiple points of origination that are arbitrated by theprober/handler supervisor 414 as directed by the state machine module406. Commands received from the test program 103 may be placed on holdwhile commands from the state machine module 406 and the SPC module 408are executed by the prober/handler supervisor 414. Once the prober orhander commands are completed the hold may be released. As describedbelow, the interposition of the prober or handler commands from thestate machine module 406 will be transparent to the application model ofthe test program 103. For example, if an application model of the testprogram 103 is querying for a new part to test, a command may be issuedby the test program 103 to determine what parts for test are available,while in the background, the state machine module 406 may decide toplace any commands from the test program 103 on hold at theprober/handler supervisor 414 while another prober or handler commandfrom the state machine module 406 is executed first.

Bin Control Component:

As illustrated in FIGS. 4 and 8, an exemplary bin control module 410 maykeep track of binning and yield values. The bin control module 410 canprovide a command interface for the SPC module 408 and any othercomponent that needs access to this information (e.g., a yield monitoror a wafer map display). In one exemplary embodiment, a bin controlmodule 410 may evaluate both software and hardware bin counts and yieldcounts for both overall and per site. An exemplary bin control module410 may also keep track of consecutive bin counts. These counts plusoverall and per site yield may be used to implement the SPC rules whichtrack these numbers.

Measured Value Monitor (MVM) module:

As illustrated in FIGS. 4 and 9, an exemplary MVM module 412 may performone or more of the following actions listed in table 7:

TABLE 7 Process test cell program event data logging events. Capture andstore measured values (such values can be held in memory for very fastcalculations and access). Perform statistical analysis in real-time(e.g. mean, min, max, STD, CPK, etc.). Selectively capture values. Storevalues in local XML files for import into a database. Utilize a commandset to control operations and access results. Provide options forcapture of raw data and/or reporting of statistical results. Capturetest suite test times and provide test time statistics.

In one exemplary embodiment, an MVM module 412 may be a test programevent data logging (EDL) client which can capture measured values andtest suite test times. In one embodiment, the EDL event stream may be atest program event stream which contains test information and testresults. The MVM module 412 may also monitor the EDL event stream andcapture useful data, either live while the test program 103 is runningor offline using a saved data collection file. The MVM module 412 mayprocess the EDL event stream in both online and offline modes. The MVMmodule 412 processes captured values from many test executions to reportstatistical data such as mean, min, max, and standard deviation. The MVMmodule 412 also collects the start and completion timestamp for eachtest cell execution so that it can report test suite test times. Thesemeasurements can be used to generate statistical data regarding minimum,maximum and mean start time values for each named test suite. Inaddition to the statistical reporting of values and test times, the MVMmodule 412 may also write raw value log files every 30 seconds. Thesefiles can provide the ability to display value and test time wafer mapslive while a wafer is being tested.

Exemplary MVM module 412 embodiments may be queried live for SPC ruleevaluations. The MVM module 412 may also periodically write raw orstatistic wafer (e.g. device under test) files which may be used by aweb server 902 to display a summary screen, such as a wafer map, withthe wafer map providing a map of test results for a semiconductor wafer,etc. An exemplary state machine module 406 may also initialize the MVMmodule 412 with tests that should be monitored and the SPC module 408can make queries as needed to evaluate SPC rules.

In one exemplary embodiment, all MVM data may be kept in memory, such asa database server 416. Such memory storage may provide fast query timesand improve processing times when processing large groups of data forstatistical reporting. In one exemplary embodiment, any data that needsto be saved can be automatically written to an XML file during wafertesting or at the end of a wafer or lot. In one exemplary embodiment, asillustrated in FIG. 9, an MVM module 412 may also be supported with alocal MVM client graphical user interface (GUI) 904 which allows directqueries and a display of MVM data in the form of charts, histograms andwafer maps. The local MVM client GUI 904 may also be used while thestatistical analysis and process control framework 400 is running

Statistical Process Control Customization:

A flexible component framework enables customization of SPC rules byallowing the creation of additional rules as well as further editing andmodifying existing SPC rules. Such editing and creation of SPC ruleswith a web-based SPC rules editor is also described in detail herein.Custom components 420, as illustrated in FIGS. 4 and 10, may integrateseamlessly with standard components by sharing the same test cellcommunications framework for the sending and receiving of eventnotifications and commands. Custom components will therefore be able tocommunicate with other modules and receive test cell events so that thecustom components may synchronize with test cell activities. An exampleof a custom module is an exemplary process parameter control (PPC)module 1102. As illustrated in FIG. 11, and discussed herein, the PPCmodule 1102 may be called by a state machine module 406 during a lotstart.

Process Parameter Control Module:

As illustrated in FIG. 11, an exemplary process parameter control (PPC)module 1102 can keep track of critical parameters than may be used whilerunning a test program 103. These parameters may include a test programname, a probe card ID, a prober firmware revision, a prober driverconfiguration, and a quantity of touchdowns for a particular probe card.A PPC module 1102 may check critical parameters that are found to beresponsible for low yield or poor throughput of lot executions. Bymaking sure the parameters are correct, the statistical analysis andprocess control framework 400 may avoid wasted test time that may resultfrom mistakes in a test setup. Statistical analysis and process controlframework embodiments 400 that include PPC modules 1102 may provide oneway to improve yield by making sure that all setup parameters arecorrect. Many low yielding lots can be found to be caused by simpleproblems, such as: a worn probe card (e.g. touchdowns), an incorrecttest program, wrong handling equipment, or a wrong firmware. By checkingthese parameters at lot start, the statistical analysis and processcontrol framework 400 may therefore avoid costly testing mistakes.

Statistical process control methods as described herein may provide aneffective way to identify testing process problems early before they canimpact test cell throughput. The modular framework described herein mayaddress the challenges associated with implementing SPC rules at wafersort or final test on the test cell controller 102. A modular approachallows a high level of flexibility in factor integration andcustomization with the capability to work with existing test cells. Anexemplary embodiment of a statistical analysis and process controlframework 400 may effectively monitor and control production testing andalso provide tools like the MVM module 412 for characterizing newdevices-under-test during the ramp up phase of such a device.

The SPC rules can provide real-time control in an automated testequipment environment. The SPC rules can provide self-correction ofequipment to an optimal level. For example, while test results may bepassing a pass/fail criteria, under SPC rules a detected downward trendin quality that has not yet reached a failing level can be corrected toreach a desired optimal level.

The exemplary statistical process control methods, described herein, maytherefore be used to go beyond simple pass/fail testing. The statisticalanalysis and process control framework 400 provides a way to measurequantitatively how far from normal process parameters are running. Withpass or fail testing, only simple black and white answers can beprovided, but with the above described statistical process controlmethods, a gray scale of answers to what is actually happening may beprovided. Exemplary statistical analysis and process control framework400 embodiments provide the necessary modules to implement the abovedescribed statistical process control methods, and do so in a way thatinduces negligible overhead. Further, exemplary real-time statisticalprocess control and actions may be implemented without changing anapplication model or writing custom prober or handler drivers or hookfunctions.

Exemplary statistical analysis and process control framework modulessuch as the MVM module 412, the bin control module 410, and theprober/handler supervisor 414 can also be used during engineeringcharacterization to examine critical values, monitor bin results, anduse the prober 108 in an interactive mode, respectively. As discussedherein, statistical analysis and process control framework 400embodiments may also provide graphical user interfaces for accessing themodules, for interactively accessing and customizing process controlrules (and their parameters), as well as for interactively queryingresults while a wafer or other device under test is still running

Algorithm and Structure Describing Test Cell Control:

An algorithm and structure is provided to create and define SPC rules(control rules and actions) used in the creation of a decision tree. Inone exemplary embodiment, a plurality of SPC rules may be combined intoa decision tree, with an algorithm created and/or followed that maydetermine when SPC rules are verified and an order of executing actionsin response to SPC rule failures, such that more critical or prioritySPC rule failures/violations are acted on first. In one exemplaryembodiment, a decision tree may comprise a plurality of SPC rules thatmay be executed in a compound fashion that may best describe a modelingprocess for production troubleshooting. For example, multiple SPC rulesmay be executed together such that a consecutive bin failure SPC rulemay be combined with a needle cleaning followed by a retest of apreviously known good die.

In one exemplary embodiment, SPC rule definitions may be centrallystored and managed in a database 416 to serve multiple purposes. Forexample, SPC rules may be executed in either a long loop format or ashort loop format. In one exemplary long loop format, historicalanalysis of SPC rule executions may be used to define an optimal set ofSPC rules for run time (as well as an optimal order for the selected setof SPC rules, as well as optimal combinations of SPC rules). In oneexemplary embodiment, the historical analysis may accurately describethe run-time environment for purposes of simulation. Further, thehistorical analysis may include the calculation of predictive figures ofmerit related to run-time execution on live equipment. In one exemplaryembodiment, SPC rules may be executed on historical data as if the datawas live. Based on these simulated results, the SPC rules may beoptimally refined so that improved SPC rules may be executed inproduction testing.

In one exemplary embodiment, a structure may be used to define anddescribe SPC rules. Data source (parameters) may be defined as monitorinputs for a particular SPC rule. Rules (statistics and functions) maythen be defined that use the monitor inputs. Actions and events may bedefined that are asserted based on rule outcomes. In one exemplaryembodiment, the structure may be flexible to define a many-to-manyrelationship of source to rules to actions. In one exemplary embodiment,a decision tree may comprise a plurality of SPC rules that may be loadedin optimal combinations and executed in optimal sequences at run time.In one exemplary embodiment, an SPC rule structure may be used toprovide for an automatic action and recovery of equipment to operationalhealth when SPC rule violations are detected, through the use ofoptimally combined SPC rules and actions that may be used to attempt toreturn the equipment to operational health.

In one exemplary embodiment, the SPC rules structure may be executed atrun-time. Such a structure when executed at run-time may define aseverity of any SPC rule violation, as well as determined controlpriorities in response to any SPC rule violation. Lastly, the SPC rulesstructure may avoid conflicts with other controlling entities. Forexample, while an SPC rule may assert the execution of an equipmentmaintenance action, if the test cell has just performed the requestedmaintenance event on an automatic schedule, the requested action wouldnot be performed (as it was already performed on the automaticschedule).

In one exemplary embodiment, statistical process control rules may alsobe used to dynamically adjust the scheduling of commands to the prober108 and handler 110 of the handling equipment 106. For example, thescheduling of prober needle cleaning can be adjusted dynamically, ratherthan the needle cleaning being performed in a fixed fashion (e.g., theneedles are clean after every 50 dies, etc.). Such a static schedule maynot be optimum. If the needles are cleaned too often, they will wear outprematurely, but if they aren't cleaned frequently enough, foreignmatter may collect on the needles. Using statistical analysis andprocess control management, needle cleaning can be performed in anoptimal manner, rather than following a rigid schedule. In a similarmanner, when event notifications are received by a state machine module406, such as an end of test notice, the state machine module 406 maydetermine that it is currently an appropriate time for SPC ruleverification. The state machine module 406 may therefore send an SPCrule trigger to the SPC module 408 and in consequence, the SPC module408 will begin executing SPC rules (singly or in combination) that areselected for verification as determined by an analysis of the eventnotifications received by the SPC module 408.

FIG. 12 illustrates the steps to a process for selecting and arrangingSPC rules into a decision tree, executing the SPC rules (singly and incombinations) in the decision tree and executing actions in response toSPC rule failures. In step 1202 of FIG. 12, a repository of SPC rules isaccessed and a plurality of SPC rules is selected. The selected SPCrules may be arranged into a decision tree. Once arranged into adecision tree, the selected SPC rules may be executed as determined by adecision tree arrangement as well as an analysis of received eventnotifications (e.g., SPC rules selected for verification (singly or incombinations) may be selected based upon test cell events and executedin an optimal order, and any required actions may be executed in anorder determined by each SPC rule failure's priority).

In step 1204 of FIG. 12, requested statistical analyses of test resultsare received. Each SPC rule may select one or more statistical analysesof test results. The requested statistical analyses will be evaluatedfor corresponding SPC rule verification. As described herein, SPC rules(singly or in combination) will not be verified until defined testprogress interval limits have been reached as determined by the testresults and received event notifications.

In step 1206 of FIG. 12, the SPC rules perform their defined evaluationsof the received one or more statistical analyses of test results. Thestatistical tests as performed by, for example, a measured value monitor412, may be defined and/or edited for a desired statistical test. Thestatistical tests are also performed for SPC rule verification uponreaching corresponding interval thresholds and/or event notifications.As described herein, the statistical tests performed may be for adefined combination of SPC rules.

In step 1208 of FIG. 12, the SPC rules may select an action to beexecuted in response to an evaluation of the one or more associatedstatistical analyses. For example, as discussed herein, if an SPC ruleverification fails, an associated action may be performed. In oneexemplary embodiment, when a plurality of SPC rules fail, an SPC rulewith the highest priority may have its action executed first.

Creation & Scheduling of a Decision Tree for a Test Cell Controller:

As illustrated in FIG. 13, in one exemplary embodiment of a test cellcontroller102, a decision tree for SPC rule execution may be created,scheduled, and executed. In one exemplary embodiment, a reduction inlatency may be provided by synchronizing SPC rule executions and actionsin synchronization with the operations of the prober 108 or hander 110of the handling equipment 106. As illustrated in FIG. 13, in oneexemplary embodiment, in-between the execution of tests 1302 on devices,periods of testing inactivity, such as prober and handling equipmentindexing times 1304 may be identified. In one exemplary embodiment, anindexing time lasts 400-600 ms. It is during these periods of testinginactivity (e.g. indexing time) 1304 that the creation, schedulingand/or execution of a decision tree comprised of SPC rules may beaccomplished. As illustrated in FIG. 13, MVM capture 1306, SBC capture1308, PPC and SPC rule execution 1310 and subsequent SPC rule-initiatedactions (e.g. prober 108 and handler 110 actions) 1312 may be performedduring testing inactivity times (e.g. indexing time) 1304.

As discussed herein, an exemplary “index time” is a total time betweenthe end of a last test flow and the beginning of a new test flowexecution. This time may include many different operations such asdevice switch out, binning, etc. In one exemplary embodiment, from onedevice to another, the indexing time at wafer sort is the time it takesto position the probe 108 from one XY location on a wafer to another XYlocation on the wafer and to inform the test controller to get ready forthe next test execution. At a final test, the indexing time is the timethe handler 110 will need to take to remove the package from the socket,bin it into a good/bad tray and insert another package into the socketand inform the tester that the package is ready for testing.

In one exemplary embodiment, computational windows of opportunity may beidentified to reduce SPC rule execution latency, such that the decisiontree may be executed with low latency and near zero overhead or testtime impact to a continuous testing process. For example, the executionof the SPC rules in the decision tree can be executed during idleperiods of the current testing process. For example, as illustrated inFIG. 13, the SPC rules may be executed during prober and handlingequipment indexing times. The SPC rules may be verified during periodsof low test activity, such that the analysis of test results (e.g.periods of result computation) may be conducted while periods of testmonitoring (e.g. periods of test computation) are not being conducted. Acomputation window may be identified and defined, such that a time whenthe computation window opens and closes may be identified. Thedefinition of the computational window (e.g., its start and stop times)may be used to stop, delay or synchronize the creation and execution ofa decision tree.

In one exemplary embodiment, a definition of a computational windowincludes event scheduling. Event scheduling may include communicationswith material handling equipment 106 to collect event information as towhere other materials are positionally located to determine a window ofavailability for the synchronized decision tree creation and execution.In one exemplary embodiment, stepping event variability may bedetermined to predictably determine the window of opportunity (e.g.,variability in stepping of X-axis versus Y-axis at wafer sort, and endof wafer, etc.).

The creation and execution of a decision tree during identifiedcomputational windows may improve the ability of exemplary statisticalanalysis process control framework embodiments to provide an adaptivetest program environment. The test program environment may performprocess drift detection and prevention to alert, stop, or automaticallytake action on a product stream to avoid the creation of a “bad”product. In one exemplary embodiment, maintenance automation, such asdiagnostic procedures may be executed in computational windows within arunning production process which may improve the outcome of maintenanceand repair processes.

In one exemplary embodiment, the creation and execution of a decisiontree may be concurrent with other processing within the test cell. Forexample, the computational window can be concurrent with anyprober/handler supervisor 414 initiated holds as discussed above.

FIG. 14 illustrates the steps to a process for creating and executing adecision tree in an identified computational window of increasedcomputational capacity. In step 1402 of FIG. 14, a computational windowis determined. In one exemplary embodiment, a computational window is aperiod of time with increased computational capacity. As discussedherein, a period of increased computational capacity may coincide withperiods of testing inactivity, such as prober/handling equipmentindexing times, or in other periods of reduced testing activity, asdiscussed herein. In one exemplary embodiment, a computational window isidentified based upon projected or forecasted testing activities.

In step 1404 of FIG. 14, a decision tree is created during an identifiedcomputational window of increased computational capacity. In oneembodiment, a period of increased computational capacity coincides withdecreased testing activities.

In step 1406 of FIG. 14, a decision tree is executed during anidentified computational window of increased computational capacity,which coincides with a period of decreased testing activities. In oneembodiment, the execution of the decision tree may take place in adifferent computational window from the computational window when thedecision tree was created. In one exemplary embodiment, the execution ofa decision tree comprises at least one of test data acquisition, testdata statistical analysis, and execution of actions in response tostatistical analysis of the test data.

PH Supervisor Module & Proxy PH Driver: An Interposer for InjectingControl or Data Collection without Disrupting Test Cell Operation:

As illustrated in FIG. 15, the prober/handler supervisor 414 may be usedas an interposer to inject actions or data collection into a test celloperation. As described herein, in one exemplary embodiment, a prober orhandler command may be injected into a production process, with thecommand injected seamlessly and without disrupting the test cell. Asillustrated in FIG. 15, a test program 103 sends function calls andreceives responses in return from a proxy prober/handler driver 1502.Upon receiving a function call, the function call can be forwarded onfrom the proxy PH driver 1502 to the prober/handler supervisor 414 wherecontrol commands and other status request communications may becommunicated to the prober 108 or handler 110 of the material handlingequipment 106 via a custom or standard PH driver library 1504. In oneembodiment, the control commands and status request communications areGPIB commands. In one exemplary embodiment, the control commands andstatus request communications may be transmitted via a buss, such asGPIB, RS-232, and LAN, etc.

As illustrated in FIG. 15, a test execution server 1506 may beinterposed between the state machine 406 and test cell APIs 1508. In oneexemplary embodiment, a state machine 406 may access test cell APIs 1508through the test execution server 1506. As also illustrated in FIG. 15,alarms and events are passed through the test execution server 1506 fromto the state machine 406. In other words, the test execution server 1506may be used to isolate the test cell APIs 1508 from direct access frommodules of the test cell. In one exemplary embodiment, the testexecution server 1506 serves as an interface between the state machineand the test cell APIs 1508. Alarms and events may be received by thetest execution server 1506, which in turn dispatches them to the statemachine 406 and other modules in the test cell architecture.

In one embodiment without an ability to interpose commands, anapplication model of a test program 103 calls a library driver thatcommunicates directly with the material handling equipment 106 (e.g., aprober 108 or handler 110). Therefore, in exemplary embodiments, a proxylibrary 1502 is installed where the application model of the testprogram 103 will be looking for the driver library. In one embodiment,the proxy library 1502 may look like a traditional library to theapplication model of the test program 103. As described herein, theproxy library 1502 may forward commands from the application model tothe prober/handler supervisor 414 using the test cell communicationsframework, which in turn may execute the received command with thecustom or standard PH library 1504.

As illustrated in FIG. 15, additional prober or handler commands may beinitiated by modules of the statistical analysis and process framework400 (rather than just the test program 103). In one embodiment, theadditional prober or handler commands are initiated by the state machinemodule 406. As discussed herein, such additional prober or handlercommands may be SPC rule-initiated actions in response to a detected SPCrule violation or failure. As described herein, an SPC rule-initiatedaction, such as a z-height adjustment or needle cleaning, may betransparently interposed into the test operation. In one exemplaryembodiment, when an SPC rule-initiated action needs to be implemented ata prescribed time (e.g., during handler operations to retrieve a nextunit for test), the PH supervisor 414 may insert a hold into test celloperations until such a time that the SPC requested action is completed.Such a hold will prevent any further function calls from the testprogram 103 from being communicated to the material handling equipment106 (e.g., the prober 108 and/or handler 110). In one exemplaryembodiment, a test cell may issue a periodic command to clean theneedles or perform other handling equipment functions, so interposedcommands as described herein may be scheduled around and/or take thescheduling of commands into account, such that an SPC rule initiatedaction will not duplicate a scheduled test cell-initiated command.

As illustrated in FIG. 15, an exemplary PH Supervisor 414 maysynchronize the state machine 406 with the execution of the test program103 by synchronizing with the execution of prober or handler equipmentdriver calls from the application model. The state machine module 406and the test program 103 may be synchronized by holding a testprogram-initiated PH call so that the state machine 406 can perform SPCrule-initiated actions and have access to the PH driver library in thePH supervisor 414 as needed. The PH Supervisor 414 may allow SPCrule-initiated actions to perform z-height adjustment, needle cleaning,and status query and control. In one exemplary embodiment, the PHSupervisor 414 may synchronize the state machine 406 with the executionof the test program 103 by synchronizing with the execution of prober orhandler equipment driver calls from the application model of the testprogram 103. This synchronization may allow the state machine 406 toperform SPC rule checks and SPC rule-initiated actions during aprober/handler index times (e.g. periods of test inactivity while thehandling equipment 106 is preparing for a next test flow byrepositioning a prober 108 at wafer sort or by retrieving a next devicefor test at final test, etc.).

In one exemplary embodiment, an exemplary PH Supervisor 414 can performthe functions listed in table 9.

TABLE 9 Execution hold at lot, wafer, die, and pause actions. a. Theseholds may be synchronized with a normal test cell idle time so that theholds don't impact throughput of the test cell. b. These holds may allowa statistical analysis and process control framework to perform its SPCfunctions at the lot, wafer, and die levels. Execution of commands tocontrol the prober or handler during a hold period which can be used togather status or to perform special operations such as auto z-heightadjustments. Loading PH driver shared libraries during lot start. Normaltest cell controller operation loads a fixed PH driver shared library.The PH Supervisor 414 may change libraries and report which library isloaded. A command can also be provided to select the driverconfiguration file at a later date.

As illustrated in FIG. 15, the test program application model may callthe Proxy PH driver 1502 functions in the same manner as it would callnormal PH driver functions. In other words, the test program applicationmodel is not aware that its commands are received by a proxy PH driver1502 and passed on to the PH driver library 1504 instead of beingreceived directly by the PH driver library 1504. The proxy PH driver1502 may pass the request for a function execution to the PH Supervisor414 using an IPC message queue. In most cases, the PH Supervisor 414 mayexecute the matching call within the custom or standard PH driverlibrary 1504. In one exemplary embodiment, the Proxy PH driver library1502 is loaded by the application model and has a superset of allfunction calls for both handler and prober drivers.

In one exemplary embodiment, the operation of the PH Supervisor 414 willnot add overhead to the execution of the test cell. For this reason, ahold on PH calls (from the test program) may occur during testingpauses, such as a prober or handling equipment indexing time (e.g.periods of test inactivity while the handling equipment 106 is preparingfor a next test flow by repositioning a prober 108 at wafer sort, or byretrieving a next device for test at final test, etc.). In one exemplaryembodiment, the PH driver call that loads the next package or die may beplaced on hold. In one embodiment, the overhead of the PH supervisor 414is extremely small, such as on the order of 200 μsecs per call.

A decision to make a physical action (e.g., needle cleaning, etc.) needsto be executed at an optimal time. As described herein, the normal testprocess may be temporarily placed on hold so that a requested physicalaction will bring the production system into an optimal level ofperformance. While an exemplary intrusion (e.g., interposed physicalaction) may potentially slow down the testing, correcting the process orthe prevention of improper testing or additional unnecessary testing ofbad components will improve later testing. As described herein, onepurpose of exemplary embodiments is to optimize production bycustomizing SPC rules, building decision trees, and executing thedecision trees at desired periods of low test activity as well astransparently interposing prober and handler commands without theprogramming model becoming aware of the hold on its equipment handlercommands.

FIG. 16 illustrates an exemplary flow diagram of a test flow executed byan ATE test cell. In step 1602 of FIG. 16, a device test is initiated.In step 1604 of FIG. 16, a command to get the next die for testing isexecuted. As discussed herein, the request is communicated to the PHsupervisor 414 and at this time, as illustrated in step 1606 of FIG. 16,the prober or handler command may be placed on hold while an SPCrule-initiated action is carried out. Upon completion of the SPCrule-initiated action, the hold may be released by the PH supervisor 414and the PH command will be forwarded and the next requested dieretrieved. As illustrated in FIG. 16, the test flow returns from step1606 back to step 1604. Upon returning to step 1604 of FIG. 16, and uponcompletion of the get die command, the testing process will continuewith step 1608 of FIG. 16 and testing will commence on the newly placeddie. In step 1610 of FIG. 16, a prober 108 and handler 110 of thehandling equipment 106 will enter an indexing time. As discussed herein,such an indexing time may also be used to perform SPC rule processing,as the testing activity is diminished during the indexing, with acorresponding increase in available computational capacity. In step 1612of FIG. 16, the testing on the current die is completed and a testfinished command is initiated and the current die is swapped out for thenext die to be tested and the process returned to step 1602.

FIG. 17 illustrates a process for transparently interposing SPCrule-initiated prober or handler commands in between testprogram-initiated prober or handler commands. In step 1702 of FIG. 17, atest program-initiated prober or handler command is generated andtransmitted to a PH supervisor 414.

In step 1704 of FIG. 17, an SPC rule-initiated prober or handler commandis generated and transmitted to the PH supervisor 414. In one exemplaryembodiment, the SPC rule-initiated prober or handler command may begenerated and transmitted in response to a process control rule failure(e.g. an “additional” prober or handler command).

In step 1706 of FIG. 17, in anticipation of the execution of the SPCrule-initiated prober or handler commands, the test program-initiatedprober or handler commands are placed on hold by the PH supervisor 414.In one exemplary embodiment, the placing of the hold by the PHsupervisor 414 is by direction of the state machine module 406. In step1708 of FIG. 17, the SPC rule-initiated prober or handler command isexecuted. In one exemplary embodiment, the execution of the SPCrule-initiated prober or handler command and the placing of the testprogram-initiated prober or handler commands on hold is transparent tothe test program 103.

Although certain preferred embodiments and methods have been disclosedherein, it will be apparent from the foregoing disclosure to thoseskilled in the art that variations and modifications of such embodimentsand methods may be made without departing from the spirit and scope ofthe invention. It is intended that the invention shall be limited onlyto the extent required by the appended claims and the rules andprinciples of applicable law.

What is claimed is:
 1. An apparatus for testing a device, the apparatuscomprising: a test control module operable to generate and transmitfirst prober and handler (PH) requests to a supervisor module, whereinthe supervisor module is operable to transmit first PH commands to aprober and handler for execution thereof; and a test analysis moduleoperable to generate and transmit second PH requests to the supervisormodule, wherein the supervisor module is further operable to transmitsecond PH commands to the prober and handler for execution thereof, andwherein the execution of the second PH commands are performedtransparently to the test control module.
 2. The apparatus of claim 1,wherein the test analysis module is further operable to perform testanalyses of test results accessed by the test analysis module, andwherein the second PH requests are generated in response to the testanalyses of the test results.
 3. The apparatus of claim 1, wherein thetest control module is further operable to generate test resultsresponsive to testing of the device, and wherein the first PH requestsare generated during testing of one or more devices.
 4. The apparatus ofclaim 1, wherein the supervisor module is further operable to generate ahold on any received first PH requests while a second PH command iscontemporaneously being executed by the prober and handler.
 5. Theapparatus of claim 4, wherein a hold on first PH requests comprises ahold on at least one of a new lot loading, a wafer switching, a dieswitching, XY location switching, and test control module initiatedpause actions.
 6. The apparatus of claim 1, wherein the first PHcommands comprise at least one of prober and handler control commandsand status queries.
 7. The apparatus of claim 1, wherein the second PHcommands comprise at least one of z-height adjustment commands, needlecleaning commands, status queries, and prober and handler controlcommands.
 8. A method for testing a device, the method comprising:generating and transmitting first prober and handler (PH) commands to aprober and handler for execution, wherein the first PH commands aregenerated in response to first PH requests from a test control module;generating and transmitting second (PH) commands to the prober andhandler for execution, wherein the second PH commands are generated inresponse to first PH requests from a test analysis module, and whereinthe execution of the second PH commands is performed transparently tothe test control module.
 9. The method of claim 8, wherein the executionof the second PH commands is performed transparently to the test controlmodule by a supervisor module interposed between the test control moduleand the test analysis module and the prober and handler, and wherein thesupervisor module transmits first and second PH commands in response toreceived first and second PH requests.
 10. The method of claim 9 furthercomprising generating a hold on any first PH requests received by the PHsupervisor while a second PH command is contemporaneously being executedby the prober and handler.
 11. The method of claim 10, wherein a hold onfirst PH requests comprises a hold on at least one of a new lot loading,a wafer switching, a die switching, XY location switching, and testcontrol module initiated pause actions.
 12. The method of claim 8further comprising performing test analyses of test results accessed bythe test analysis module, wherein the second PH requests are generatedin response to the test analyses of the test results.
 13. The method ofclaim 8 further comprising: generating test results during testing of adevice, wherein the first PH requests are generated during testing ofone or more devices.
 14. The method of claim 8, wherein the first PHcommands comprise at least one of prober and handler control commandsand status queries.
 15. The method of claim 8, wherein the second PHcommands comprise at least one of z-height adjustment commands, needlecleaning commands, status queries, and prober and handler controlcommands.
 16. A computer readable media comprising computer-executableinstructions stored therein, the computer-executable instructionscomprising a method comprising: instructions to generate and transmitfirst prober and handler (PH) commands to a prober and handler forexecution, wherein the first PH commands are generated in response tofirst PH requests from a test control module; instructions to generateand transmit second (PH) commands to the prober and handler forexecution, wherein the second PH commands are generated in response tofirst PH requests from a test analysis module, and wherein the executionof the second PH commands is performed transparently to the test controlmodule.
 17. The computer readable media of claim 16, wherein theexecution of the second PH commands is performed transparently to thetest control module by a supervisor module interposed between the testcontrol module and the test analysis module and the prober and handler,and wherein the supervisor module transmits first and second PH commandsin response to received first and second PH requests.
 18. The computerreadable media of claim 17, wherein the method further comprisesinstructions to generate a hold on any first PH requests received by thePH supervisor while a second PH command is contemporaneously beingexecuted by the prober and handler, wherein a hold on first PH requestscomprises a hold on at least one of a new lot loading, a waferswitching, a die switching, XY location switching, and test controlmodule initiated pause actions.
 19. The computer readable media of claim16, wherein the method further comprises: instructions to perform testanalyses of test results accessed by the test analysis module, whereinthe second PH requests are generated in response to the test analyses ofthe test results; and instructions to generate test results duringtesting of a device, wherein the first PH requests are generated duringtesting of one or more devices.
 20. The computer readable media of claim16, wherein the first PH commands comprise at least one of prober andhandler control commands and status queries, and wherein the second PHcommands comprise at least one of z-height adjustment commands, needlecleaning commands, status queries, and prober and handler controlcommands.